Publication:

Electrical characterisation of shallow cobalt-silicided junctions

Date

2000
Proceedings Paper
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, Cor
dc.contributor.authorLukyanchikova, N.
dc.contributor.authorPetrichuk, M.
dc.contributor.authorGarbar, N.
dc.contributor.authorCzerwinski, A.
dc.contributor.authorKatcki, J.
dc.contributor.authorRatajczak, J.
dc.contributor.authorGaubas, Eugenijus
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-14T13:48:21Z
dc.date.available2021-10-14T13:48:21Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4755
dc.source.beginpage7
dc.source.conference3rd International Conference Materials for Microelectronics
dc.source.conferencedate16/10/2000
dc.source.conferencelocationDublin Ireland
dc.source.endpage10
dc.title

Electrical characterisation of shallow cobalt-silicided junctions

dc.typeProceedings paper
dspace.entity.typePublication
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