Publication:
Molybdenum CMP for damascene applications
Date
| dc.contributor.author | Teugels, Lieve | |
| dc.contributor.author | Philipsen, Harold | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Devriendt, Katia | |
| dc.contributor.imecauthor | Teugels, Lieve | |
| dc.contributor.imecauthor | Philipsen, Harold | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.imecauthor | Devriendt, Katia | |
| dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
| dc.contributor.orcidimec | Philipsen, Harold::0000-0002-5029-1104 | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
| dc.date.accessioned | 2021-10-29T05:18:36Z | |
| dc.date.available | 2021-10-29T05:18:36Z | |
| dc.date.issued | 2020-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36063 | |
| dc.identifier.url | https://www.web-events.net/doc/users/840/bib/globalprogramvf.pdf | |
| dc.source.beginpage | S10.5 | |
| dc.source.conference | 29th Materials for Advanced Metallization | |
| dc.source.conferencedate | 16/11/2020 | |
| dc.source.conferencelocation | Autrans France | |
| dc.title | Molybdenum CMP for damascene applications | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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