Publication:
Resist and process implementation issues in future processes for ULSI applications
Date
| dc.contributor.author | Ronse, Kurt | |
| dc.contributor.imecauthor | Ronse, Kurt | |
| dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
| dc.date.accessioned | 2021-10-15T06:24:47Z | |
| dc.date.available | 2021-10-15T06:24:47Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2003-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8080 | |
| dc.source.beginpage | 300 | |
| dc.source.endpage | 305 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 67-68 | |
| dc.title | Resist and process implementation issues in future processes for ULSI applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |