Publication:
Weibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitrides
Date
| dc.contributor.author | O'Connor, R. | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Veloso, Anabela | |
| dc.contributor.author | Hughes, G. | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.date.accessioned | 2021-10-15T15:07:27Z | |
| dc.date.available | 2021-10-15T15:07:27Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9354 | |
| dc.source.beginpage | 61 | |
| dc.source.endpage | 65 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 72 | |
| dc.title | Weibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitrides | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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