Publication:
Non-destructive characterisation of porous low-k dielectric films
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Moguilnikov, Konstantin | |
| dc.date.accessioned | 2021-10-14T21:07:55Z | |
| dc.date.available | 2021-10-14T21:07:55Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5986 | |
| dc.source.beginpage | 335 | |
| dc.source.endpage | 349 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 64 | |
| dc.title | Non-destructive characterisation of porous low-k dielectric films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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