Large improvement of phosphorus incorportion efficiency in n-type chemical vapor deposition of diamond

dc.contributor.author	Ohtani, Ryota
dc.contributor.author	Yamamoto, Takashi
dc.contributor.author	Janssens, Stoffel
dc.contributor.author	Yamasaki, Satoshi
dc.contributor.author	Koizumi, Satoshi
dc.date.accessioned	2021-10-22T04:25:05Z
dc.date.available	2021-10-22T04:25:05Z
dc.date.embargo	9999-12-31
dc.date.issued	2014
dc.identifier.issn	0003-6951
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24339
dc.source.beginpage	232106
dc.source.issue	23
dc.source.journal	Applied Physics Letters
dc.source.volume	105
dc.title	Large improvement of phosphorus incorportion efficiency in n-type chemical vapor deposition of diamond
dc.type	Journal article
dspace.entity.type	Publication
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