Publication:

Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

Date

2016
Journal article
https://doi.org/10.1063/1.4953779
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dc.contributor.authorFicek, Mateusz
dc.contributor.authorSankaran, Kamatchi
dc.contributor.authorRyl, Jacek
dc.contributor.authorBogdanowicz, Robert
dc.contributor.authorLin, I-Nan
dc.contributor.authorHaenen, Ken
dc.contributor.authorDarowicki, Kazimierz
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-23T10:49:29Z
dc.date.available2021-10-23T10:49:29Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.doi10.1063/1.4953779
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26619
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/108/24/10.1063/1.4953779
dc.source.beginpage241906
dc.source.journalApplied Physics Letters
dc.source.volume108
dc.title

Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

dc.typeJournal article
dspace.entity.typePublication
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