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Impact of organic contamination on gate oxide integrity
Publication:
Impact of organic contamination on gate oxide integrity
Date
1998
Proceedings Paper
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2441.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Gendt, Stefan
;
Knotter, Martin
;
Kenis, Karine
;
Depas, Michel
;
Meuris, Marc
;
Mertens, Paul
;
Heyns, Marc
Journal
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1888
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1888
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations