Publication:
Plasma damage and restoration of CVD low-k materials
Date
| dc.contributor.author | Smirnov, Evgeny | |
| dc.contributor.author | Ferchichi, Abdelkarim | |
| dc.contributor.author | Zhao, Larry | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-18T03:13:55Z | |
| dc.date.available | 2021-10-18T03:13:55Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16248 | |
| dc.source.beginpage | P2-31 | |
| dc.source.conference | International Conference Micro- and Nanoelectronics - ICMNE | |
| dc.source.conferencedate | 5/10/2009 | |
| dc.source.conferencelocation | Moscow Russia | |
| dc.title | Plasma damage and restoration of CVD low-k materials | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |