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Extracting active dopant profile information from carrier illmination power curves

Date

2005
Proceedings Paper
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dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorLoo, Roger
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-16T01:24:50Z
dc.date.available2021-10-16T01:24:50Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10401
dc.source.conferenceUSJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors
dc.source.conferencedate5/06/2005
dc.source.conferencelocationDaytona Beach, FL USA
dc.title

Extracting active dopant profile information from carrier illmination power curves

dc.typeProceedings paper
dspace.entity.typePublication
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