Impact of state-of-the-art Cz substrates on the current-voltage characteristics of shallow p-n junctions

dc.contributor.author	Poyai, Amporn
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Claeys, Cor
dc.contributor.author	Huber, A.
dc.contributor.author	Gräf, D.
dc.contributor.author	Gaubas, Eugenijus
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-14T22:51:57Z
dc.date.available	2021-10-14T22:51:57Z
dc.date.issued	2002
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/6741
dc.source.beginpage	695
dc.source.conference	Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology
dc.source.conferencedate	13/05/2002
dc.source.conferencelocation	Philadelphia, PA USA
dc.source.endpage	704
dc.title	Impact of state-of-the-art Cz substrates on the current-voltage characteristics of shallow p-n junctions
dc.type	Proceedings paper
dspace.entity.type	Publication
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