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Atomic layer deposition of high-k dDielectrics on single-walled carbon nanotubes: a Raman study

Date

2013
Journal article
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dc.contributor.authorLiyanage, Luckshitha
dc.contributor.authorCott, Daire
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBao, Zhenan
dc.contributor.authorWong, Philip
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-21T09:30:21Z
dc.date.available2021-10-21T09:30:21Z
dc.date.issued2013
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22714
dc.source.beginpage245703
dc.source.issue24
dc.source.journalNanotechnology
dc.source.volume24
dc.title

Atomic layer deposition of high-k dDielectrics on single-walled carbon nanotubes: a Raman study

dc.typeJournal article
dspace.entity.typePublication
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