Publication:

Enhancing the quality of low temperature SiO2 by atomic hydrogen exposure for excellent NBTI reliability

Date

2020
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Author(s)

Franco, Jacopo  
;
de Marneffe, Jean-Francois  
;
Vandooren, Anne  
;
Kimura, Yosuke  
;
Nyns, Laura  
;
Wu, Zhicheng  
;
El-Sayed, Al-Moatasem
;
Jech, Markus
;
Waldhoer, Dominic
;
Claes, Dieter  
;
Arimura, Hiroaki  
;
Ragnarsson, Lars-Ake  
;
Afanas'ev, Valeri
;
Stesmans, Andre  
;
Horiguchi, Naoto  
;
Linten, Dimitri  
;
Grasser, Tibor
;
Kaczer, Ben  

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