Publication:

Metal stack optimization for low-power and high-density for N7-N5

Date

2016
Proceedings Paper
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dc.contributor.authorRaghavan, Praveen
dc.contributor.authorFirouzi, Farshad
dc.contributor.authorMatti, L.
dc.contributor.authorDebacker, Peter
dc.contributor.authorBaert, Rogier
dc.contributor.authorSherazi, Yasser
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorGerousis, V.
dc.contributor.authorDusa, Mircea
dc.contributor.authorRyckaert, Julien
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMcIntyre, Greg
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorDusa, Mircea
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-23T13:57:30Z
dc.date.available2021-10-23T13:57:30Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27179
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2510926
dc.source.beginpage97810Q
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability X
dc.source.conferencedate24/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.title

Metal stack optimization for low-power and high-density for N7-N5

dc.typeProceedings paper
dspace.entity.typePublication
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