Publication:

The stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensors

Date

1998
Proceedings Paper
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dc.contributor.authorEsch, Heleen
dc.contributor.authorHuyberechts, Guido
dc.contributor.authorMertens, Robert
dc.contributor.authorMaes, Guido
dc.contributor.authorManca, Jean
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorDe Schepper, Luc
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Ceuninck, Ward
dc.date.accessioned2021-09-30T11:56:26Z
dc.date.available2021-09-30T11:56:26Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2569
dc.source.beginpage583
dc.source.conferenceTechnical Digest of the 7th International Meeting on Chemical Sensors
dc.source.conferencedate27/06/1998
dc.source.conferencelocationBeijing China
dc.source.endpage585
dc.title

The stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensors

dc.typeProceedings paper
dspace.entity.typePublication
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