Publication:

Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2659369
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dc.contributor.authorAbbasirad, Najmeh
dc.contributor.authorSaadeh, Qais
dc.contributor.authorCiesielski, Richard
dc.contributor.authorGottwald, Alexander
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorMakhotkin, Igor
dc.contributor.authorSokolov, Andrey
dc.contributor.authorKolbe, Michael
dc.contributor.authorScholze, Frank
dc.contributor.authorSoltwisch, Victor
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.date.accessioned2024-04-17T09:36:20Z
dc.date.available2023-07-28T17:40:05Z
dc.date.available2024-04-17T09:36:20Z
dc.date.embargo2023-03-31
dc.date.issued2023
dc.identifier.doi10.1117/12.2659369
dc.identifier.eisbn978-1-5106-6100-4
dc.identifier.isbn978-1-5106-6099-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42242
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 124963B
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVII
dc.source.conferencedateFEB 27-MAR 02, 2023
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages4
dc.source.volume12496
dc.title

Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

dc.typeProceedings paper
dspace.entity.typePublication
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