Publication:
Single-wafer wet chemical oxide formation for pre-ALD high-k deposition on 300 mm wafer
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1897 since deposited on 2021-10-17
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Acq. date: 2026-02-28
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Statistics
Views
1897 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-02-28
Citations