Publication:
Exploration of SAMs (self-assembled monolayers) in advanced Cu interconnects
Date
| dc.contributor.author | Maestre Caro, Arantxa | |
| dc.contributor.thesisadvisor | Maes, Guido | |
| dc.contributor.thesisadvisor | Borghs, Gustaaf | |
| dc.date.accessioned | 2021-10-20T13:03:28Z | |
| dc.date.available | 2021-10-20T13:03:28Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2012-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21073 | |
| dc.title | Exploration of SAMs (self-assembled monolayers) in advanced Cu interconnects | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |