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Analysis and modeling of the HV-SSRM nanocontact on silicon

Date

2009
Meeting abstract
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dc.contributor.authorEyben, Pierre
dc.contributor.authorClemente, Francesca
dc.contributor.authorVanstreels, Kris
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorClarysse, Trudo
dc.contributor.authorMody, Jay
dc.contributor.authorDuriau, Edouard
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMylvaganam, Kausala
dc.contributor.authorZhang, Liangchi
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-17T22:09:03Z
dc.date.available2021-10-17T22:09:03Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15287
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
dc.title

Analysis and modeling of the HV-SSRM nanocontact on silicon

dc.typeMeeting abstract
dspace.entity.typePublication
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