Publication:

Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

Date

2009
Proceedings Paper
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dc.contributor.authorChiarella, Thomas
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorKerner, Christoph
dc.contributor.authorDittrich, Rok
dc.contributor.authorRakowski, Michal
dc.contributor.authorOrtolland, Claude
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorParvais, Bertrand
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorKubicek, Stefan
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVrancken, Christa
dc.contributor.authorBrus, Stephan
dc.contributor.authorLauwers, Anne
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorRakowski, Michal
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.date.accessioned2021-10-17T21:34:41Z
dc.date.available2021-10-17T21:34:41Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15091
dc.source.beginpage85
dc.source.conference39th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate14/09/2009
dc.source.conferencelocationAthens Greece
dc.source.endpage88
dc.title

Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

dc.typeProceedings paper
dspace.entity.typePublication
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