Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions

dc.contributor.author	Opsomer, Karl
dc.contributor.author	Deduytsche, D.
dc.contributor.author	Detavernier, C.
dc.contributor.author	Van Meirhaeghe, R.L.
dc.contributor.author	Lauwers, Anne
dc.contributor.author	Maex, Karen
dc.contributor.author	Lavoie, C.
dc.contributor.imecauthor	Opsomer, Karl
dc.contributor.imecauthor	Lauwers, Anne
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-10-16T18:21:33Z
dc.date.available	2021-10-16T18:21:33Z
dc.date.embargo	9999-12-31
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/12653
dc.source.beginpage	31906
dc.source.issue	3
dc.source.journal	Applied Physics Letters
dc.source.volume	90
dc.title	Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions
dc.type	Journal article
dspace.entity.type	Publication
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