Publication:
Nanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper pads
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1 since deposited on 2021-10-29
Acq. date: 2026-04-26
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2049 since deposited on 2021-10-29
Acq. date: 2026-04-26
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1 since deposited on 2021-10-29
Acq. date: 2026-04-26
Views
2049 since deposited on 2021-10-29
Acq. date: 2026-04-26
Citations