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Nanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper pads
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Nanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper pads
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Date
2020-02
Dissertation
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47706.pdf
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APA
Chicago
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IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Okudur, Oguzhan Orkut
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since deposited on 2021-10-29
Acq. date: 2025-12-15
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since deposited on 2021-10-29
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Acq. date: 2025-12-15
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Downloads
1
since deposited on 2021-10-29
Acq. date: 2025-12-15
Views
2043
since deposited on 2021-10-29
1
last month
Acq. date: 2025-12-15
Citations