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Sidewall roughness in photonic crystal slabs: a comparison of high-contrast membranes and low-contrast III-V epitaxial structures

Date

2003
Proceedings Paper
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dc.contributor.authorBogaerts, Wim
dc.contributor.authorBienstman, P.
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-15T04:02:25Z
dc.date.available2021-10-15T04:02:25Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7229
dc.source.beginpage349
dc.source.conference11th European Conference on Integrated Optics - ECIO
dc.source.conferencedate2/04/2003
dc.source.conferencelocationPrague Czech Republic
dc.source.endpage352
dc.title

Sidewall roughness in photonic crystal slabs: a comparison of high-contrast membranes and low-contrast III-V epitaxial structures

dc.typeProceedings paper
dspace.entity.typePublication
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