Publication:

Electrical characterization of CNT contacts with Cu damascene top contact

Date

2013

Journal article

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Files

23728.pdf 1.21 MB

Author(s)

van der Veen, Marleen

;

;

Huyghebaert, Cedric

;

;

Masahito, Sugiura

;

Kashiwagi, Yusaku

;

;

Caluwaerts, Rudy

;

Chiodarelli, Nicolo

;

Vereecken, Philippe

;

;

;

De Gendt, Stefan

;

Journal

Microelectronic Engineering

Statistics

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