Electrical characterization of CNT contacts with Cu damascene top contact

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Author(s)

van der Veen, Marleen

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Huyghebaert, Cedric

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;

Masahito, Sugiura

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Kashiwagi, Yusaku

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;

Caluwaerts, Rudy

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Chiodarelli, Nicolo

;

Vereecken, Philippe

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;

De Gendt, Stefan

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Journal

Microelectronic Engineering

Metrics

1898 since deposited on 2021-10-21

Acq. date: 2025-12-08