Publication:
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
1 since deposited on 2021-10-18
Acq. date: 2025-10-23
Views
1960 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Downloads
1 since deposited on 2021-10-18
Acq. date: 2025-10-23
Views
1960 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations