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Tailored Si-layers on silicon oxide obtained by thermal CVD
Publication:
Tailored Si-layers on silicon oxide obtained by thermal CVD
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Date
1998
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Beaucarne, Guy
;
Poortmans, Jef
;
Caymax, Matty
;
Nijs, Johan
;
Mertens, Robert
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Acq. date: 2025-12-17
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2099
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-17
Citations