Publication:
Insight of chemical mechanical cleaning and its future
Date
| dc.contributor.author | Kim, Tae-Gon | |
| dc.date.accessioned | 2021-10-18T17:39:35Z | |
| dc.date.available | 2021-10-18T17:39:35Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17374 | |
| dc.source.conference | The 7th International Surface Cleaning Workshop | |
| dc.source.conferencedate | 28/10/2010 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.title | Insight of chemical mechanical cleaning and its future | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |