A detailed study of SCM on cross-sectional and beveled junctions

dc.contributor.author	Duhayon, Natasja
dc.contributor.author	Clarysse, Trudo
dc.contributor.author	Eyben, Pierre
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Hellemans, L.
dc.contributor.imecauthor	Duhayon, Natasja
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.accessioned	2021-10-14T16:53:51Z
dc.date.available	2021-10-14T16:53:51Z
dc.date.embargo	9999-12-31
dc.date.issued	2001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/5274
dc.source.beginpage	160
dc.source.conference	6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ
dc.source.conferencedate	22/04/2001
dc.source.conferencelocation	Napa, CA USA
dc.title	A detailed study of SCM on cross-sectional and beveled junctions
dc.type	Meeting abstract
dspace.entity.type	Publication
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