Publication:
Electromigration issues for advanced Al interconnects
Date
| dc.contributor.author | Proost, Joris | |
| dc.contributor.thesisadvisor | Maex, Karen | |
| dc.contributor.thesisadvisor | Delaey, L. | |
| dc.date.accessioned | 2021-10-01T08:43:29Z | |
| dc.date.available | 2021-10-01T08:43:29Z | |
| dc.date.issued | 1998-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2880 | |
| dc.title | Electromigration issues for advanced Al interconnects | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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