Publication:

Study of the mechanical stress impact on silicide contact resistance by 4-point bending

Date

2019
Proceedings Paper
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dc.contributor.authorLiu, Yefan
dc.contributor.authorYu, Hao
dc.contributor.authorHiblot, Gaspard
dc.contributor.authorKruv, Anastasiia
dc.contributor.authorSchaekers, Marc
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorVelenis, Dimitrios
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorLiu, Yefan
dc.contributor.imecauthorYu, Hao
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.imecauthorKruv, Anastasiia
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecYu, Hao::0000-0002-1976-0259
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-27T12:50:57Z
dc.date.available2021-10-27T12:50:57Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33462
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8720416
dc.source.beginpage1
dc.source.conference2019 IEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedate31/03/2019
dc.source.conferencelocationMonterey, CA USA
dc.source.endpage5
dc.title

Study of the mechanical stress impact on silicide contact resistance by 4-point bending

dc.typeProceedings paper
dspace.entity.typePublication
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