Publication:
Focused ion beam analysis of Cu/low-k metallisation structures
Date
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-14T16:37:03Z | |
| dc.date.available | 2021-10-14T16:37:03Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5051 | |
| dc.source.conference | Advances in Focused Ion Beam Microscopy - FIB; March 2001; Oxford, UK. | |
| dc.source.conferencelocation | ||
| dc.title | Focused ion beam analysis of Cu/low-k metallisation structures | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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