Publication:
High resolution electron microscopy for semiconductor materials
Date
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.date.accessioned | 2021-09-29T12:49:55Z | |
| dc.date.available | 2021-09-29T12:49:55Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/398 | |
| dc.source.beginpage | 1109 | |
| dc.source.book | Handbook on Semiconductors. Vol. 3a: Materials, Properties and Preparations | |
| dc.source.endpage | 1147 | |
| dc.title | High resolution electron microscopy for semiconductor materials | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |