Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Impact of the silicon substrate resistivity and growth condition on the deep levels in Ni-Au/AlN/Si MIS capacitors
Publication:
Impact of the silicon substrate resistivity and growth condition on the deep levels in Ni-Au/AlN/Si MIS capacitors
Date
2017
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Chong
;
Simoen, Eddy
;
Zhao, Ming
;
Li, Wei
Journal
Semiconductor Science and Technology
Abstract
Description
Metrics
Views
1892
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
1892
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations