Publication:
Challenges for Atomic Layer Deposition for CMOS devices with high mobility channel materials
Date
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-18T15:58:06Z | |
| dc.date.available | 2021-10-18T15:58:06Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17000 | |
| dc.source.conference | Oxford Instruments Workshop | |
| dc.source.conferencedate | 30/06/2010 | |
| dc.source.conferencelocation | Glasgow UK | |
| dc.title | Challenges for Atomic Layer Deposition for CMOS devices with high mobility channel materials | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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