Publication:
From aggressive scaling of ULSI devices to nanomaterials
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Claeys, Cor | |
| dc.date.accessioned | 2021-10-17T21:19:21Z | |
| dc.date.available | 2021-10-17T21:19:21Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14935 | |
| dc.source.beginpage | 13 | |
| dc.source.conference | Rusnanotech: Nanotechnology International Forum | |
| dc.source.conferencedate | 6/10/2009 | |
| dc.source.conferencelocation | Moscow Russia | |
| dc.title | From aggressive scaling of ULSI devices to nanomaterials | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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