Publication:
3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
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2001 since deposited on 2021-10-22
1last month
Acq. date: 2026-06-06
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Statistics
Views
2001 since deposited on 2021-10-22
1last month
Acq. date: 2026-06-06
Citations