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Theory of photomodulated optical reflectance on active doping profiles in silicon
Publication:
Theory of photomodulated optical reflectance on active doping profiles in silicon
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Shaughnessy, Derrick
;
Salnick, Alex
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1883
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Acq. date: 2025-12-10
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Metrics
Views
1883
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-10
Citations