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Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
Publication:
Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tung, C. Maryann
;
Doise, Jan
;
Karageorgos, Ioannis
;
Ryckaert, Julien
;
Wong, H.-S. Philip
Journal
Abstract
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1849
since deposited on 2021-10-23
411
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Acq. date: 2025-10-24
Citations
Metrics
Views
1849
since deposited on 2021-10-23
411
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations