Publication:

ALD on high mobility channels: engineering the proper gate stack passivation

Date

2010
Meeting abstract
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Author(s)

Sioncke, Sonja
;
Lin, Dennis  
;
Brammertz, Guy  
;
Delabie, Annelies  
;
Conard, Thierry  
;
Caymax, Matty  
;
Meuris, Marc  
;
Struyf, Herbert  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Fleischmann, Claudia  
;
Temst, Kristiaan  
;
Vantomme, Andre  
;
Beckhoff, Burkhard

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Abstract

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