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Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS
Publication:
Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS
Date
2010
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Merckling, Clement
;
Chang, Yao-Chung
;
Penaud, Julien
;
Lu, Chung-Yu
;
Brammertz, Guy
;
Meuris, Marc
;
Dekoster, Johan
;
Heyns, Marc
;
Caymax, Matty
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1916
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1916
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations