Monolithic integration of microlenses on the backside of a silicon photonics chip for expanded beam coupling

dc.contributor.author	Mangal, Nivesh
dc.contributor.author	Snyder, Bradley
dc.contributor.author	Van Campenhout, Joris
dc.contributor.author	Van Steenberge, Geert
dc.contributor.author	Missinne, Jeroen
dc.contributor.imecauthor	Mangal, Nivesh
dc.contributor.imecauthor	Snyder, Bradley
dc.contributor.imecauthor	Van Campenhout, Joris
dc.contributor.imecauthor	Van Steenberge, Geert
dc.contributor.imecauthor	Missinne, Jeroen
dc.contributor.orcidimec	Van Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimec	Van Steenberge, Geert::0000-0001-8574-1235
dc.contributor.orcidimec	Missinne, Jeroen::0000-0002-3470-620X
dc.date.accessioned	2022-09-21T10:17:47Z
dc.date.available	2021-11-02T16:03:56Z
dc.date.available	2022-09-21T10:17:47Z
dc.date.issued	2021
dc.identifier.doi	10.1364/OE.412353
dc.identifier.issn	1094-4087
dc.identifier.pmid	MEDLINE:33726258
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/38098
dc.publisher	OPTICAL SOC AMER
dc.source.beginpage	7601
dc.source.endpage	7615
dc.source.issue	5
dc.source.journal	OPTICS EXPRESS
dc.source.numberofpages	15
dc.source.volume	29
dc.subject.keywords	ARRAYS
dc.title	Monolithic integration of microlenses on the backside of a silicon photonics chip for expanded beam coupling
dc.type	Journal article
dspace.entity.type	Publication
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