Publication:

Pupil wavefront manipulation for optical nanolithography

Date

2012
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorKempsell Sears, Monica
dc.contributor.authorBekaert, Joost
dc.contributor.authorSmith, Bruce W.
dc.contributor.imecauthorBekaert, Joost
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-20T12:08:43Z
dc.date.available2021-10-20T12:08:43Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20913
dc.source.beginpage832611
dc.source.conferenceOptical Microlithography XXV
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
dc.title

Pupil wavefront manipulation for optical nanolithography

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
24730.pdf
Size:
1015.32 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions