Publication:

Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses

Date

2010
Meeting abstract
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dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVan Besien, Els
dc.contributor.authorTrompoukis, Christos
dc.contributor.authorShamiryan, Denis
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T22:36:03Z
dc.date.available2021-10-18T22:36:03Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18119
dc.source.beginpagePS1-TuA-3
dc.source.conferenceAmerican Vacuum Society 57th International Symposium and Exhibition
dc.source.conferencedate17/10/2010
dc.source.conferencelocationAlbuquerque, NM USA
dc.title

Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses

dc.typeMeeting abstract
dspace.entity.typePublication
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