Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Publication:
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Copy permalink
Date
1998
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
2380.pdf
330.79 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Witte, Hilde
;
Vandervorst, Wilfried
;
Gijbels, Renaat
Journal
Abstract
Description
Metrics
Views
1899
since deposited on 2021-09-30
Acq. date: 2025-12-11
Citations
Metrics
Views
1899
since deposited on 2021-09-30
Acq. date: 2025-12-11
Citations