Publication:
Low temperature CNT growth for BEOL interconnects
Date
| dc.contributor.author | Cott, Daire | |
| dc.contributor.author | Masahito, Sugiura | |
| dc.contributor.author | Vanpaemel, Johannes | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Vereecken, Philippe | |
| dc.contributor.imecauthor | Cott, Daire | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Vereecken, Philippe | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
| dc.date.accessioned | 2021-10-21T07:03:53Z | |
| dc.date.available | 2021-10-21T07:03:53Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22178 | |
| dc.source.conference | MRS Fall Meeting | |
| dc.source.conferencedate | 1/12/2013 | |
| dc.source.conferencelocation | Boston USA | |
| dc.title | Low temperature CNT growth for BEOL interconnects | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |