Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Dopant/carrier profiling for ULSI
Publication:
Dopant/carrier profiling for ULSI
Copy permalink
Date
1998
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Clarysse, Trudo
;
De Wolf, Peter
;
Trenkler, Thomas
;
Hantschel, Thomas
;
Stephenson, Robert
Journal
Future Fab International
Abstract
Description
Statistics
Views
1971
since deposited on 2021-10-01
3
last month
Acq. date: 2026-01-26
Citations
Statistics
Views
1971
since deposited on 2021-10-01
3
last month
Acq. date: 2026-01-26
Citations