Publication:

Irridium based electrodes for ferroelectric capacitor fabrication

Date

2002
Proceedings Paper
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dc.contributor.authorJohnson, Jo
dc.contributor.authorLisoni, Judit
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-14T21:56:52Z
dc.date.available2021-10-14T21:56:52Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6448
dc.source.beginpage59
dc.source.conferenceFerroelectric Thin Films X
dc.source.conferencedate25/11/2001
dc.source.conferencelocationBoston, MA USA
dc.source.endpage64
dc.title

Irridium based electrodes for ferroelectric capacitor fabrication

dc.typeProceedings paper
dspace.entity.typePublication
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