Publication:
Update on resist outgassing qualification towards NXE3100
Date
| dc.contributor.author | Pollentier, Ivan | |
| dc.contributor.author | Lokasani, Ragava | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.imecauthor | Pollentier, Ivan | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
| dc.date.accessioned | 2021-10-20T14:44:05Z | |
| dc.date.available | 2021-10-20T14:44:05Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21323 | |
| dc.source.conference | IEUVI Resist TWG | |
| dc.source.conferencedate | 12/02/2012 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Update on resist outgassing qualification towards NXE3100 | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |