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Articles
CMOS foundry-based micromachining
Publication:
CMOS foundry-based micromachining
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Date
1996
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1509.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tilmans, Harrie
;
Baert, Kris
;
Verbist, Agnes
;
Puers, Bob
Journal
Journal of Micromechanics and Microengineering
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1951
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1951
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations