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Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
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Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franquet, Alexis
;
Conard, Thierry
;
Hantschel, Thomas
;
Vandervorst, Wilfried
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1781
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Acq. date: 2025-12-16
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Metrics
Views
1781
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-16
Citations